검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Design and fabrication of very small MEMS microphone with silicon diaphragm supported by Z-shape arms using SOI wafer Ganji BA, Sedaghat SB, Roncaglia A, Belsito L Solid-State Electronics, 148, 27, 2018 |
| 2 |
Strain effects on n-InGaAs heterostructure-on-insulator made by direct wafer bonding Rossel C, Weigele P, Czornomaz L, Daix N, Caimi D, Sousa M, Fompeyrine J Solid-State Electronics, 98, 88, 2014 |
| 3 |
SiC power devices on QUASIC and SiCOI Smart-Cut (R) substrates: First demonstrations Letertre F, Daval N, Templier F, Bano E, Planson D, Di Ciocco L, Jalaguier E, Bluet JM, Billon T, Madar R, Chante JP Materials Science Forum, 433-4, 813, 2002 |