검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Temperature dependence of SiO2/Si interfacial structure formed by radio-frequency magnetron sputter deposited SiO2 thin films on Si(111) Li BQ, Fujimoto T, Kojima I Journal of Vacuum Science & Technology A, 17(2), 552, 1999 |
| 2 |
Comparison of Si/SiO2 interface roughness from electron cyclotron resonance plasma and thermal oxidation Zhao C, Hu YZ, Labayen T, Lai L, Irene EA Journal of Vacuum Science & Technology A, 16(1), 57, 1998 |