검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Deposition of nanostructured crystalline alumina thin film by twin targets reactive high power impulse magnetron sputtering Zhou GX, Wang LP, Wang XF, Yu YH Applied Surface Science, 455, 310, 2018 |
| 2 |
Optical emission spectroscopy study of a radio-frequency magnetron discharge used for the fabrication of X-ray multilayer mirror Cilia M, Yakshin A, Trambly H, Vidal B, Bretagne J Thin Solid Films, 312(1-2), 320, 1998 |
| 3 |
Quenching of Electron-Temperature and Electron-Density in Ionized Physical Vapor-Deposition Dickson M, Qian F, Hopwood J Journal of Vacuum Science & Technology A, 15(2), 340, 1997 |
| 4 |
Axially-Resolved Study of Highly Ionized Physical Vapor-Deposition Dickson M, Hopwood J Journal of Vacuum Science & Technology A, 15(4), 2307, 1997 |
| 5 |
Film Thickness Variation in a Cylindrical Magnetron Deposition Device Car T, Radic N Thin Solid Films, 293(1-2), 78, 1997 |