검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
130 nm and 150 nm line-and-space critical-dimension control evaluation using XS-1 x-ray stepper Tanaka Y, Taguchi T, Fujii K, Tsuboi S, Yamabe M, Suzuki K, Gomei Y, Hisatsugu T, Fukuda M, Morita H Journal of Vacuum Science & Technology B, 16(6), 3509, 1998 |