검색결과 : 1건
No. | Article |
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1 |
Nanometer-scale Si-selective epitaxial growth using an ultrathin SiO2 mask Miyata N, Watanabe H, Ichikawa M Journal of Vacuum Science & Technology B, 17(3), 978, 1999 |
No. | Article |
---|---|
1 |
Nanometer-scale Si-selective epitaxial growth using an ultrathin SiO2 mask Miyata N, Watanabe H, Ichikawa M Journal of Vacuum Science & Technology B, 17(3), 978, 1999 |