검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Data and modeling of negative ion transport in gases of interest for production of integrated circuits and nanotechnologies Petrovic ZL, Raspopovic ZM, Stojanovic VD, Jovanovic JV, Malovic G, Makabe T, de Urquijo J Applied Surface Science, 253(16), 6619, 2007 |
| 2 |
Semiempirical Method for Extracting Electron-Molecule Cross-Sections from Experimental-Data - CF4 as an Example Stefanov B, Pirgov P Plasma Chemistry and Plasma Processing, 13(4), 655, 1993 |