검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Estimation of the activation energy for Ar/Cl-2 plasma etching of InP via holes using electron cyclotron resonance Sabin EW Journal of Vacuum Science & Technology B, 16(4), 1841, 1998 |
| No. | Article |
|---|---|
| 1 |
Estimation of the activation energy for Ar/Cl-2 plasma etching of InP via holes using electron cyclotron resonance Sabin EW Journal of Vacuum Science & Technology B, 16(4), 1841, 1998 |