검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Comparative study of ZrN and Zr-Ge-N thin films as diffusion barriers for Cu metallization on Si Leu LC, Sadik P, Norton DP, McElwee-White L, Anderson TJ Journal of Vacuum Science & Technology B, 26(5), 1723, 2008 |
| No. | Article |
|---|---|
| 1 |
Comparative study of ZrN and Zr-Ge-N thin films as diffusion barriers for Cu metallization on Si Leu LC, Sadik P, Norton DP, McElwee-White L, Anderson TJ Journal of Vacuum Science & Technology B, 26(5), 1723, 2008 |