검색결과 : 43건
| No. | Article |
|---|---|
| 1 |
Nanoscale etching of III-V semiconductors in acidic hydrogen peroxide solution: GaAs and InP, a striking contrast in surface chemistry van Dorp DH, Arnauts S, Laitinen M, Sajavaara T, Meersschaut J, Conard T, Kelly JJ Applied Surface Science, 465, 596, 2019 |
| 2 |
Thermal atomic layer deposition of AlOxNy thin films for surface passivation of nano-textured flexible silicon Parashar PK, Kinnunen SA, Sajavaara T, Toppari JJ, Komarala VK Solar Energy Materials and Solar Cells, 193, 231, 2019 |
| 3 |
In-situ annealing characterization of atomic-layer-deposited Al2O3 in N-2, H-2 and vacuum atmospheres Broas M, Lemettinen J, Sajavaara T, Tilli M, Vuorinen V, Suihkonen S, Paulasto-Krockel M Thin Solid Films, 682, 147, 2019 |
| 4 |
Low-Temperature Molecular Layer Deposition Using Monofunctional Aromatic Precursors and Ozone-Based Ring-Opening Reactions Svard L, Putkonen M, Kentta E, Sajavaara T, Krahl F, Karppinen M, Van de Kerckhove K, Detavernier C, Simell P Langmuir, 33(38), 9657, 2017 |
| 5 |
Characterization and Electrochemical Properties of Oxygenated Amorphous Carbon (a-C) Films Palomakia T, Wester N, Johansson LS, Laitinen M, Jiang H, Arstila K, Sajavaara T, Han JG, Koskinen J, Laurila T Electrochimica Acta, 220, 137, 2016 |
| 6 |
Effect of ozone concentration on silicon surface passivation by atomic layer deposited Al2O3 von Gastrow G, Li S, Putkonen M, Laitinen M, Sajavaara T, Savin H Applied Surface Science, 357, 2402, 2015 |
| 7 |
Aluminum oxide from trimethylaluminum and water by atomic layer deposition: The temperature dependence of residual stress, elastic modulus, hardness and adhesion Ylivaara OME, Liu XW, Kilpi L, Lyytinen J, Schneider D, Laitinen M, Julin J, Ali S, Sintonen S, Berdova M, Haimi E, Sajavaara T, Ronkainen H, Lipsanen H, Koskinen J, Hannula SP, Puurunen RL Thin Solid Films, 552, 124, 2014 |
| 8 |
Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors Putkonen M, Bosund M, Ylivaara OME, Puurunen RL, Kilpi L, Ronkainen H, Sintonen S, Ali S, Lipsanen H, Liu XW, Haimi E, Hannula SP, Sajavaara T, Buchanan I, Karwacki E, Vaha-Nissi M Thin Solid Films, 558, 93, 2014 |
| 9 |
Antibacterial and barrier properties of oriented polymer films with ZnO thin films applied with atomic layer deposition at low temperatures Vaha-Nissi M, Pitkanen M, Salo E, Kentta E, Tanskanen A, Sajavaara T, Putkonen M, Sievanen J, Sneck A, Ratto M, Karppinen M, Harlin A Thin Solid Films, 562, 331, 2014 |
| 10 |
Influence of titanium-substrate roughness on Ca-P-O thin films grown by atomic layer deposition Sagari ARA, Malm J, Laitinen M, Rahkila P, Ma HQ, Putkonen M, Karppinen M, Whitlow HJ, Sajavaara T Thin Solid Films, 531, 26, 2013 |