검색결과 : 2건
No. | Article |
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1 |
Improvement in gate LWR with plasma curing of ArF photoresists Ando A, Matsui E, Matsuzawa NN, Yamaguchi Y, Kugimiya K, Yoshida M, Salam KMA, Kusakabe T, Tatsumi T Thin Solid Films, 515(12), 4928, 2007 |
2 |
Structural and electrical properties of crystalline (1-x)Ta2O5-xTiO(2) thin films fabricated by metalorganic decomposition Salam KMA, Konishi H, Mizuno M, Fukuda H, Nomura S Applied Surface Science, 190(1-4), 88, 2002 |