검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effects of the final oxidation step on N and O distributions in silicon oxide/nitride/oxide ultrathin films Salgado TDM, Radtke C, Krug C, de Andrade J, Baumvol IJR Journal of the Electrochemical Society, 146(10), 3788, 1999 |