검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Analysis and metrology with a focused helium ion beam Sijbrandij S, Notte J, Scipioni L, Huynh C, Sanford C Journal of Vacuum Science & Technology B, 28(1), 73, 2010 |
| 2 |
Analysis of subsurface beam spread and its impact on the image resolution of the helium ion microscope Sijbrandij S, Notte J, Sanford C, Hill R Journal of Vacuum Science & Technology B, 28(6), C6F6, 2010 |
| 3 |
The impact of etch-stop layer for borderless contacts on deep submicron CMOS device performance - a comparative study Liao H, Lee PS, Goh LNL, Liu H, Sudijono JL, Elgin Q, Sanford C Thin Solid Films, 462-63, 29, 2004 |