검색결과 : 13건
| No. | Article |
|---|---|
| 1 |
Optimized tilted c-axis AlN films for improved operation of shear mode resonators DeMiguel-Ramos M, Mirea T, Clement M, Olivares J, Sangrador J, Iborra E Thin Solid Films, 590, 219, 2015 |
| 2 |
Porous silicon oxide sacrificial layers deposited by pulsed-direct current magnetron sputtering for microelectromechanical systems Olivares J, Clement M, Gonzalez-Castilla S, Vergara L, Iborra E, Sangrador J Thin Solid Films, 518(18), 5128, 2010 |
| 3 |
Effect of rapid thermal annealing on the crystal quality and the piezoelectric response of polycrystalline AlN films Vergara L, Olivares J, Iborra E, Clement M, Sanz-Hervas A, Sangrador J Thin Solid Films, 515(4), 1814, 2006 |
| 4 |
Porous SiGe nanostructures formed by electrochemical etching of thin poly-SiGe films Del Cano T, Sanz LF, Martin P, Avella M, Jimenez J, Rodriguez A, Sangrador J, Rodriguez T, Torres-Costa V, Martin-Palma RJ, Martinez-Duart JM Journal of the Electrochemical Society, 151(5), C326, 2004 |
| 5 |
Lifetime measurements of porous Si1-xGex stain etched Guerrero-Lemus R, Ben-Hander FA, Kenanoglu A, Borchert D, Sangrador J, Rodriguez T, Martinez-Duart JM Thin Solid Films, 451-52, 316, 2004 |
| 6 |
Effect of deposition parameters on the characteristics of low-pressure chemical vapor deposited SiGe films grown from Si2H6 and GeH4 Olivares J, Sangrador J, Rodriguez A, Rodriguez T Journal of the Electrochemical Society, 148(10), C685, 2001 |
| 7 |
Amorphous GexSi1-xOy sputtered thin films for integrated sensor applications Clement M, Iborra E, Sangrador J, Barberan I Journal of Vacuum Science & Technology B, 19(1), 294, 2001 |
| 8 |
Structural improvement of SiGe films by C and F implantation and solid phase crystallization Rodriguez A, Olivares J, Sangrador J, Rodriguez T, Ballesteros C, Castro M, Gwilliam RM Thin Solid Films, 383(1-2), 113, 2001 |
| 9 |
Metastable crystalline state induced in amorphous SiGe layers under cw visible laser illumination Martin E, Martin P, Olivares J, Rodriguez A, Sangrador J, Jimenez J, Rodriguez T Thin Solid Films, 383(1-2), 227, 2001 |
| 10 |
Raman spectroscopy study of amorphous SiGe films deposited by low pressure chemical vapor deposition and polycrystalline SiGe films obtained by solid-phase crystallization Olivares J, Martin P, Rodriguez A, Sangrador J, Jimenez J, Rodriguez T Thin Solid Films, 358(1-2), 56, 2000 |