검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Gas-phase studies in inductively coupled fluorocarbon plasmas Schaepkens M, Martini I, Sanjuan EA, Li X, Oehrlein GS, Perry WL, Anderson HM Journal of Vacuum Science & Technology A, 19(6), 2946, 2001 |
| No. | Article |
|---|---|
| 1 |
Gas-phase studies in inductively coupled fluorocarbon plasmas Schaepkens M, Martini I, Sanjuan EA, Li X, Oehrlein GS, Perry WL, Anderson HM Journal of Vacuum Science & Technology A, 19(6), 2946, 2001 |