검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Chemistry in long residence time fluorocarbon plasmas Sant SP, Nelson CT, Overzet LJ, Goeckner MJ Journal of Vacuum Science & Technology A, 27(2), 193, 2009 |
| 2 |
Relationship between gas-phase chemistries and surface processes in fluorocarbon etch plasmas: A process rate model Sant SP, Nelson CT, Overzet LJ, Goeckner MJ Journal of Vacuum Science & Technology A, 27(4), 631, 2009 |
| 3 |
Role of chamber dimension in fluorocarbon based deposition and etching of SiO2 and its effects on gas and surface-phase chemistry Joseph EA, Zhou BS, Sant SP, Overzet LJ, Goeckner MJ Journal of Vacuum Science & Technology A, 26(3), 545, 2008 |
| 4 |
Effects of pore morphology on the diffusive properties of a porous low-kappa dielectric Joseph EA, Sant SP, Goeckner MJ, Overzet LJ, Peng HG, Gidley DW, Kastenmeier BEE Journal of Vacuum Science & Technology B, 25(5), 1684, 2007 |
| 5 |
Effect of surface temperature on plasma-surface interactions in an inductively coupled modified gaseous electronics conference reactor Zhou BS, Joseph EA, Sant SP, Liu YH, Radhakrishnan A, Overzet LJ, Goeckner MJ Journal of Vacuum Science & Technology A, 23(6), 1657, 2005 |
| 6 |
Investigation and modeling of plasma-wall interactions in inductively coupled fluorocarbon plasmas Joseph EA, Zhou B, Sant SP, Overzet LJ, Goeckner MJ Journal of Vacuum Science & Technology A, 22(3), 689, 2004 |