검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Influence of adhesion of silica and ceria abrasive nanoparticles on Chemical-Mechanical Planarization of silica surfaces Volkov DO, Dandu PRV, Goodman H, Santora B, Sokolov I Applied Surface Science, 257(20), 8518, 2011 |
| No. | Article |
|---|---|
| 1 |
Influence of adhesion of silica and ceria abrasive nanoparticles on Chemical-Mechanical Planarization of silica surfaces Volkov DO, Dandu PRV, Goodman H, Santora B, Sokolov I Applied Surface Science, 257(20), 8518, 2011 |