검색결과 : 18건
| No. | Article |
|---|---|
| 1 |
Experimental and theoretical investigation of phosphorus in-situ doping of germanium epitaxial layers Yu HY, Battal E, Okyay AK, Shim J, Park JH, Baek JW, Saraswat KC Current Applied Physics, 13(6), 1060, 2013 |
| 2 |
Material characterization of high Sn-content, compressively-strained GeSn epitaxial films after rapid thermal processing Chen R, Huang YC, Gupta S, Lin AC, Sanchez E, Kim Y, Saraswat KC, Kamins TI, Harris JS Journal of Crystal Growth, 365, 29, 2013 |
| 3 |
Study of Shubnikov-de Haas oscillations and measurement of hole effective mass in compressively strained InXGa1-XSb quantum wells Nainani A, Irisawa T, Bennett BR, Boos JB, Ancona MG, Saraswat KC Solid-State Electronics, 62(1), 138, 2011 |
| 4 |
Low Temperature Germanium Growth on Silicon Oxide Using Boron Seed Layer and In Situ Dopant Activation Tada M, Park JH, Kuzum D, Thareja G, Jain JR, Nishi Y, Saraswat KC Journal of the Electrochemical Society, 157(3), H371, 2010 |
| 5 |
Effect of isochronal hydrogen annealing on surface roughness and threading dislocation density of epitaxial Ge films grown on Si Kobayashi S, Nishi Y, Saraswat KC Thin Solid Films, 518, S136, 2010 |
| 6 |
Low-Temperature, Low-Pressure Chemical Vapor Deposition and Solid Phase Crystallization of Silicon-Germanium Films Tada M, Park JH, Jain JR, Saraswat KC Journal of the Electrochemical Society, 156(1), D23, 2009 |
| 7 |
Chemical Bonding, Interfaces, and Defects in Hafnium Oxide/Germanium Oxynitride Gate Stacks on Ge(100) Oshima Y, Sun Y, Kuzum D, Sugawara T, Saraswat KC, Pianetta P, McIntyrea PC Journal of the Electrochemical Society, 155(12), G304, 2008 |
| 8 |
Atomic Layer Deposition of Hafnium Oxide on Ge and GaAs Substrates: Precursors and Surface Preparation Delabie A, Brunco DP, Conard T, Favia P, Bender H, Franquet A, Sioncke S, Vandervorst W, Van Elshocht S, Heyns M, Meuris M, Kim E, McIntyre PC, Saraswat KC, LeBeau JM, Cagnon J, Stemmer S, Tsai W Journal of the Electrochemical Society, 155(12), H937, 2008 |
| 9 |
High performance submicrometer CMOS with metal induced lateral crystallization of amorphous silicon Joshi AR, Saraswat KC Journal of the Electrochemical Society, 150(8), G443, 2003 |
| 10 |
Modeling and simulation of feature-size-dependent etching of metal stacks Abdollahi-Alibeik S, Zheng J, McVittie JP, Saraswat KC, Gabriel CT, Abraham SC Journal of Vacuum Science & Technology B, 19(1), 179, 2001 |