검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Study of local stress using stress-absorbing Si diaphragm Zheng DW, Wang XH, Shyu K, Chang CT, Guo Y, Sarihan V, Wen WJ, Tu KN Journal of Vacuum Science & Technology B, 17(5), 2178, 1999 |
| No. | Article |
|---|---|
| 1 |
Study of local stress using stress-absorbing Si diaphragm Zheng DW, Wang XH, Shyu K, Chang CT, Guo Y, Sarihan V, Wen WJ, Tu KN Journal of Vacuum Science & Technology B, 17(5), 2178, 1999 |