검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Micromachined scanning proximal probes with integrated piezoresistive readout and bimetal actuator for high eigenmode operation Woszczyna M, Zawierucha P, Paletko P, Zielony M, Gotszalk T, Sarov Y, Ivanov T, Frank A, Zollner JP, Rangelow IW Journal of Vacuum Science & Technology B, 28(6), C6N12, 2010 |
| 2 |
Parallel proximal probe arrays with vertical interconnections Sarov Y, Frank A, Ivanov T, Zollner JP, Ivanova K, Volland B, Rangelow IW, Brogan A, Wilson R, Zawierucha P, Zielony M, Gotszalk T, Nikolov N, Zier M, Schmidt B, Kostic I Journal of Vacuum Science & Technology B, 27(6), 3132, 2009 |
| 3 |
Scanning proximal probes for parallel imaging and lithography Ivanova K, Sarov Y, Ivanov T, Frank A, Zollner J, Bitterlich C, Wenzel U, Volland BE, Klett S, Rangelow IW, Zawierucha P, Zielony M, Gotszalk T, Dontzov D, Schott W, Nikolov N, Zier M, Schmidt B, Engl W, Sulzbach T, Kostic I Journal of Vacuum Science & Technology B, 26(6), 2367, 2008 |
| 4 |
Micromachined piezoresistive proximal probe with integrated bimorph actuator for aligned single ion implantation Persaud A, Ivanova K, Sarov Y, Ivanov T, Volland BE, Rangelow IW, Nikolov N, Schenkel T, Djakov V, Jenkins DWK, Meijer J, Vogel T Journal of Vacuum Science & Technology B, 24(6), 3148, 2006 |