검색결과 : 1건
No. | Article |
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1 |
Large scale nanolithography using nanoimprint lithography Heidari B, Maximov I, Sarwe EL, Montelius L Journal of Vacuum Science & Technology B, 17(6), 2961, 1999 |
No. | Article |
---|---|
1 |
Large scale nanolithography using nanoimprint lithography Heidari B, Maximov I, Sarwe EL, Montelius L Journal of Vacuum Science & Technology B, 17(6), 2961, 1999 |