검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
SIMS and high-resolution RBS analysis of ultrathin SiOxNy films Kimura K, Nakajima K, Kobayashi H, Miwa S, Satori K Applied Surface Science, 203, 418, 2003 |
| 2 |
Factors Causing Deterioration of Depth Resolution in Auger-Electron Spectroscopy Depth Profiling of Multilayered Systems Satori K, Haga Y, Minatoya R, Aoki M, Kajiwara K Journal of Vacuum Science & Technology A, 15(3), 478, 1997 |