검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Silicon nitride at high deposition rate by Hot Wire Chemical Vapor Deposition as passivating and antireflection layer on multi crystalline silicon solar cells van der Werf CHM, Goldbach HD, Loffler J, Scarfo A, Kylner AMC, Stannowski B, ArnoldBik WM, Weeber A, Rieffe H, Soppe WJ, Rath JK, Schropp REI Thin Solid Films, 501(1-2), 51, 2006 |
| 2 |
In situ technique for dynamic fluid film pressure measurement during chemical mechanical polishing Bullen D, Scarfo A, Koch A, Bramono DPY, Coppeta J, Racz L Journal of the Electrochemical Society, 147(7), 2741, 2000 |