검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Hydrogen silsesquioxane-based hybrid electron beam and optical lithography for high density circuit prototyping Guillorn M, Chang J, Fuller N, Patel J, Darnon M, Pyzyna A, Joseph E, Engelmann S, Ott J, Newbury J, Klaus D, Bucchignano J, Joshi P, Scerbo C, Kratschmer E, Graham W, To B, Parisi J, Zhang Y, Haensch W Journal of Vacuum Science & Technology B, 27(6), 2588, 2009 |
| 2 |
Effects of film reoxidation on the growth and material properties of ultrathin dielectrics grown by rapid thermal nitridation in ammonia D'Emic C, Newbury J, Scerbo C, Copel M, Gordon M Journal of Vacuum Science & Technology B, 26(4), 1382, 2008 |