검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Determination of electron temperature, atomic fluorine concentration, and gas temperature in inductively coupled fluorocarbon/rare gas plasmas using optical emission spectroscopy Schabel MJ, Donnelly VM, Kornblit A, Tai WW Journal of Vacuum Science & Technology A, 20(2), 555, 2002 |