검색결과 : 1건
No. | Article |
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1 |
Experimental and theoretical studies of a pulsed microwave excited Ar/CF4 plasma Baeva M, Luo X, Schafer JH, Uhlenbusch J, Zhang Z Plasma Chemistry and Plasma Processing, 18(4), 429, 1998 |
No. | Article |
---|---|
1 |
Experimental and theoretical studies of a pulsed microwave excited Ar/CF4 plasma Baeva M, Luo X, Schafer JH, Uhlenbusch J, Zhang Z Plasma Chemistry and Plasma Processing, 18(4), 429, 1998 |