검색결과 : 28건
| No. | Article |
|---|---|
| 1 |
Plasma etch fabrication of 60:1 aspect ratio silicon nanogratings with 200 nm pitch Mukherjee P, Bruccoleri A, Heilmann RK, Schattenburg ML, Kaplan AF, Guo LJ Journal of Vacuum Science & Technology B, 28(6), C6P70, 2010 |
| 2 |
Spatial-frequency multiplication with multilevel interference lithography Chang CH, Zhao Y, Heilmann RK, Schattenburg ML Journal of Vacuum Science & Technology B, 26(6), 2135, 2008 |
| 3 |
Fabrication of 200 nm period blazed transmission gratings on silicon-on-insulator wafers Ahn M, Heilmann RK, Schattenburg ML Journal of Vacuum Science & Technology B, 26(6), 2179, 2008 |
| 4 |
Phase control in multiexposure spatial frequency multiplication Zhao Y, Chang CH, Heilmann RK, Schattenburg ML Journal of Vacuum Science & Technology B, 25(6), 2439, 2007 |
| 5 |
Fabrication of ultrahigh aspect ratio freestanding gratings on silicon-on-insulator wafers Ahn M, Heilmann RK, Schattenburg ML Journal of Vacuum Science & Technology B, 25(6), 2593, 2007 |
| 6 |
Doppler writing and linewidth control for scanning beam interference lithography Montoya JC, Chang CH, Heilmann RK, Schattenburg ML Journal of Vacuum Science & Technology B, 23(6), 2640, 2005 |
| 7 |
High fidelity blazed grating replication using nanoimprint lithography Chang CH, Montoya JC, Akilian M, Lapsa A, Heilmann RK, Schattenburg ML, Li M, Flanagan KA, Rasmussen AP, Seely JF, Laming JM, Kjornrattanawanich B, Goray LI Journal of Vacuum Science & Technology B, 22(6), 3260, 2004 |
| 8 |
An international journal devoted to Microelectronics and Nanometer Structures - Processing, measurement, and phenomena - Preface Schattenburg ML Journal of Vacuum Science & Technology B, 21(6), 2623, 2003 |
| 9 |
Precision microcomb design and fabrication for x-ray optics assembly Sun YX, Heilmann RK, Chen CG, Forest CR, Schattenburg ML Journal of Vacuum Science & Technology B, 21(6), 2970, 2003 |
| 10 |
Nanometer-level repeatable metrology using the nanoruler Konkola PT, Chen CG, Heilmann RK, Joo CM, Montoya JC, Chang CH, Schattenburg ML Journal of Vacuum Science & Technology B, 21(6), 3097, 2003 |