검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Wafer-level vacuum packaging for MEMS Gooch R, Schimert T, McCardel W, Ritchey B, Gilmour D, Koziarz W Journal of Vacuum Science & Technology A, 17(4), 2295, 1999 |
| No. | Article |
|---|---|
| 1 |
Wafer-level vacuum packaging for MEMS Gooch R, Schimert T, McCardel W, Ritchey B, Gilmour D, Koziarz W Journal of Vacuum Science & Technology A, 17(4), 2295, 1999 |