검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Electron-beam exposure mechanisms in hydrogen silsesquioxane investigated by vibrational spectroscopy and in situ electron-beam-induced desorption Olynick DL, Cord B, Schipotinin A, Ogletree DF, Schuck PJ Journal of Vacuum Science & Technology B, 28(3), 581, 2010 |