검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
The impact of nitrogen on the defect aggregation in silicon (vol 226, pg 19, 2001) von Ammon W, Holzl R, Virbulis J, Dornberger E, Schmolke R, Graf D Journal of Crystal Growth, 240(1-2), 330, 2002 |
| 2 |
On the impact of nanotopography of silicon wafers on post-chemical mechanical polished oxide layers Schmolke R, Deters R, Thieme P, Pech R, Schwenk H, Diakourakis G Journal of the Electrochemical Society, 149(4), G257, 2002 |
| 3 |
The impact of nitrogen on the defect aggregation in silicon von Ammon W, Holzl R, Virbulis J, Dornberger E, Schmolke R, Graf D Journal of Crystal Growth, 226(1), 19, 2001 |
| 4 |
Characterization of silicon wafer back sides with low thermal oxide layers by copper deposition Schmolke R, Puppe G, Piontek H Journal of the Electrochemical Society, 147(8), 3081, 2000 |
| 5 |
Characterization of crystal quality by crystal originated particle delineation and the impact on the silicon wafer surface Graf D, Suhren M, Lambert U, Schmolke R, Ehlert A, von Ammon W, Wagner P Journal of the Electrochemical Society, 145(1), 275, 1998 |