검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Surface Nitridation of Silicon Dioxide with a High-Density Nitrogen Plasma Kraft R, Schneider TP, Dostalik WW, Hattangady S Journal of Vacuum Science & Technology B, 15(4), 967, 1997 |
| 2 |
Characterization of a Slot Antenna Microwave Plasma Source for Hydrogen Plasma Cleaning Korzec D, Werner F, Brockhaus A, Engemann J, Schneider TP, Nemanich RJ Journal of Vacuum Science & Technology A, 13(4), 2074, 1995 |
| 3 |
In-Situ Remote H-Plasma Cleaning of Patterned Si-SiO2 Surfaces Carter RJ, Schneider TP, Montgomery JS, Nemanich RJ Journal of the Electrochemical Society, 141(11), 3136, 1994 |