화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Fluorination of Si(001)-2x1 surface near step edges: A mechanism for surface defect induced etching
Srivastava D, Halicioglu T, Schoolcraft TA
Journal of Vacuum Science & Technology A, 17(2), 657, 1999
2 Molecular-Dynamics Simulations of Reactions of Hyperthermal Fluorine-Atoms with Fluorosilyl Adsorbates on the Si(100)-(2X1) Surface
Galijatovic A, Darcy A, Acree B, Fullbright G, Mccormac R, Green B, Krantzman KD, Schoolcraft TA
Journal of Physical Chemistry, 100(22), 9471, 1996
3 Molecular-Dynamics Simulations of Fluorine Molecules Interacting with a Si(100)(2X1) Surface at 1000 K
Schoolcraft TA, Diehl AM, Steel AB, Garrison BJ
Journal of Vacuum Science & Technology A, 13(4), 1861, 1995