검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Fabrication of high-aspect-ratio InP-based vertical-cavity laser mirrors using CH4/H-2/O-2/Ar reactive ion etching Schramm JE, Babic DI, Hu EL, Bowers JE, Merz JL Journal of Vacuum Science & Technology B, 15(6), 2031, 1997 |
| 2 |
Highly Selective Reactive Ion Etch Process for InP-Based Device Fabrication Using Methane Hydrogen Argon Schramm JE, Hu EL, Merz JL, Brown JJ, Melendes MA, Thompson MA, Brown AS Journal of Vacuum Science & Technology B, 11(6), 2280, 1993 |