검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Development of ALD HfZrOx with TDEAH/TDEAZ and H2O Shi X, Tielens H, Takeoka S, Nakabayashi T, Nyns L, Adelmann C, Delabie A, Schram T, Ragnarsson L, Schaekers M, Date L, Schreutelkamp R, Van Elshocht S Journal of the Electrochemical Society, 158(1), H69, 2011 |
| 2 |
Ultrashallow junctions formed by C coimplantation with spike plus submelt laser annealing Felch SB, Collart E, Parihar V, Thirupapuliyur S, Schreutelkamp R, Pawlak BJ, Hoffmann T, Severi S, Eyben P, Vandervorst W, Noda T Journal of Vacuum Science & Technology B, 26(1), 281, 2008 |
| 3 |
Leakage current control in recessed SiGe Source/Drain junctions Claeys C, Gonzalez MB, Eneman G, Verheyen P, Bender H, Schreutelkamp R, Washington L, Nouri F, Simoen E Journal of the Electrochemical Society, 154(9), H814, 2007 |