검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Simple technique for beam focusing in electron beam lithography on optically transparent substrates Schuette ML, Lu W Journal of Vacuum Science & Technology B, 27(6), 2612, 2009 |
| 2 |
Highly selective zero-bias plasma etching of GaN over AlGaN Schuette ML, Lu W Journal of Vacuum Science & Technology B, 25(6), 1870, 2007 |
| 3 |
Copper germanide Ohmic contact on n-type gallium nitride using silicon tetrachloride plasma Schuette ML, Lu W Journal of Vacuum Science & Technology B, 23(6), 3143, 2005 |