검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Controlling imprint distortions in step-and-flash imprint lithography Schuetter SD, Dicks GA, Nellis GF, Engelstad RL, Lovell EG Journal of Vacuum Science & Technology B, 22(6), 3312, 2004 |
| No. | Article |
|---|---|
| 1 |
Controlling imprint distortions in step-and-flash imprint lithography Schuetter SD, Dicks GA, Nellis GF, Engelstad RL, Lovell EG Journal of Vacuum Science & Technology B, 22(6), 3312, 2004 |