검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Three-dimensional wafer-scale copper chemical-mechanical planarization model Thakurta DG, Schwendeman DW, Gutmann RJ, Shankar S, Jiang L, Gill WN Thin Solid Films, 414(1), 78, 2002 |
| 2 |
Three-dimensional chemical mechanical planarization slurry flow model based on lubrication theory Thakurta DG, Borst CL, Schwendeman DW, Gutmann RJ, Gill WN Journal of the Electrochemical Society, 148(4), G207, 2001 |
| 3 |
Pad porosity, compressibility and slurry delivery effects in chemical-mechanical planarization: modeling and experiments Thakurta DG, Borst CL, Schwendeman DW, Gutmann RJ, Gill WN Thin Solid Films, 366(1-2), 181, 2000 |
| 4 |
Two-dimensional wafer-scale chemical mechanical planarization models based on lubrication theory and mass transport Sundararajan S, Thakurta DG, Schwendeman DW, Murarka SP, Gill WN Journal of the Electrochemical Society, 146(2), 761, 1999 |