검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Structural investigation of Si-rich amorphous silicon oxynitride films Scopel WL, Fantini MCA, Alayo MI, Pereyra I Thin Solid Films, 425(1-2), 275, 2003 |
| 2 |
On the nitrogen and oxygen incorporation in plasma-enhanced chemical vapor deposition (PECVD) SiOxNy films Alayo MI, Pereyra I, Scopel WL, Fantini MCA Thin Solid Films, 402(1-2), 154, 2002 |
| 3 |
Local structure and bonds of amorphous silicon oxynitride thin films Scopel WL, Fantini MCA, Alayo MI, Pereyra I Thin Solid Films, 413(1-2), 59, 2002 |