화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Passivation of GaAs-Surfaces and AlGaAs/GaAs Heterojunction Bipolar-Transistors Using Sulfide Solutions and Sinx Overlayer
Kapila A, Malhotra V, Camnitz LH, Seaward KL, Mars D
Journal of Vacuum Science & Technology B, 13(1), 10, 1995
2 Role of Ions in Electron-Cyclotron-Resonance Plasma-Enhanced Chemical-Vapor-Deposition of Silicon Dioxide
Seaward KL, Turner JE, Nauka K, Nel AM
Journal of Vacuum Science & Technology B, 13(1), 118, 1995