검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Plasma substrate interaction effects on composition and chemical structure of reactively r.f. magnetron sputtered carbon nitride films Kaltofen R, Sebald T, Schulte J, Weise G Thin Solid Films, 347(1-2), 31, 1999 |
| 2 |
Low-energy ion bombardment effects in reactive rf magnetron sputtering of carbon nitride films Kaltofen R, Sebald T, Weise G Thin Solid Films, 308-309, 118, 1997 |
| 3 |
Plasma Diagnostic Studies to the Carbon Nitride Film Deposition by Reactive RF Magnetron Sputtering Kaltofen R, Sebald T, Weise G Thin Solid Films, 290-291, 112, 1996 |