검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Quartz crystal microbalance study of tungsten atomic layer deposition using WF6 and Si2H6 Fabreguette FH, Sechrist ZA, Elam JW, George SM Thin Solid Films, 488(1-2), 103, 2005 |
| 2 |
Improved nucleation of TiN atomic layer deposition films on SILK low-k polymer dielectric using an Al2O3 atomic layer deposition adhesion layer Elam JW, Wilson CA, Schuisky M, Sechrist ZA, George SM Journal of Vacuum Science & Technology B, 21(3), 1099, 2003 |
| 3 |
ZnO/Al2O3 nanolaminates fabricated by atomic layer deposition: growth and surface roughness measurements Elam JW, Sechrist ZA, George SM Thin Solid Films, 414(1), 43, 2002 |