검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Applications of micro-Raman spectroscopy in salicide characterization for Si device fabrication Zhao FF, Chen SY, Shen ZX, Gao XS, Zheng JZ, See AK, Chan LH Journal of Vacuum Science & Technology B, 21(2), 862, 2003 |
| 2 |
Excimer laser-induced Ti silicidation to eliminate the fine-line effect for integrated circuit device fabrication Chen SY, Shen ZX, Xu SY, Ong CK, See AK, Chan LH Journal of the Electrochemical Society, 149(11), G609, 2002 |
| 3 |
Enhancement effect of C40TiSi(2) on the C54 phase formation Chen SY, Shen ZX, See AK, Chan LH Journal of the Electrochemical Society, 148(12), G734, 2001 |
| 4 |
Photoresist patterning and ion implantation degradation effects on flash memory device yield Cha CL, Ngo Q, Chor EF, See AK, Lee TJ Electrochemical and Solid State Letters, 3(7), 340, 2000 |
| 5 |
Spin-Dependent S-Level and Valence Photoemission from Ferromagnetic Nickel See AK, Klebanoff LE Journal of Vacuum Science & Technology A, 13(3), 1527, 1995 |