검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Formation of Ti-Si-N film using low frequency, high density inductively coupled plasma process Ee YC, Chen Z, Chan L, See KH, Law SB, Xu S, Tsakadze ZL, Rutkevych PP, Zeng KY, Shen L Journal of Vacuum Science & Technology B, 23(6), 2444, 2005 |
| 2 |
Electroless copper deposition as a seed layer on TiSiN barrier Ee YC, Chen Z, Xu S, Chan L, See KH, Law SB Journal of Vacuum Science & Technology A, 22(4), 1852, 2004 |
| 3 |
Effect of drag and frictional losses on the hydrodynamics of gas-lift reactors See KH, Roberts GW, Saez EA AIChE Journal, 45(11), 2467, 1999 |