검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Plasma-Enhanced Chemical-Vapor-Deposition of A-SiC-H Films from Organosilicon Precursors Loboda MJ, Seifferly JA, Dall FC Journal of Vacuum Science & Technology A, 12(1), 90, 1994 |
| No. | Article |
|---|---|
| 1 |
Plasma-Enhanced Chemical-Vapor-Deposition of A-SiC-H Films from Organosilicon Precursors Loboda MJ, Seifferly JA, Dall FC Journal of Vacuum Science & Technology A, 12(1), 90, 1994 |