검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Characterization of a Low-Temperature, Low-Pressure Plasma-Enhanced Chemical-Vapor-Deposition Tetraethylorthosilicate Oxide Deposition Process Arias LJ, Selbrede SC, Weise MT, Carl DA Journal of Vacuum Science & Technology A, 15(3), 1389, 1997 |
| 2 |
Characterization of Fluorinated Tetra Ethyl Ortho Silicate Oxide-Films Deposited in a Low-Pressure Plasma-Enhanced Chemical-Vapor-Deposition Reactor Weise MT, Selbrede SC, Arias LJ, Carl D Journal of Vacuum Science & Technology A, 15(3), 1399, 1997 |