검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Maximum achievable aspect ratio in deep reactive ion etching of silicon due to aspect ratio dependent transport and the microloading effect Yeom J, Wu Y, Selby JC, Shannon MA Journal of Vacuum Science & Technology B, 23(6), 2319, 2005 |
| 2 |
Adhesion mechanisms in the solid-state bonding technique using submicrometer aromatic thermosetting copolyester adhesive Xu K, Selby JC, Shannon MA, Economy J Journal of Applied Polymer Science, 92(6), 3843, 2004 |