검색결과 : 1건
No. | Article |
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1 |
A novel optimization method to automated wet-etch station scheduling in semiconductor manufacturing systems Aguirre AM, Mendez CA, Castro PM Computers & Chemical Engineering, 35(12), 2960, 2011 |
No. | Article |
---|---|
1 |
A novel optimization method to automated wet-etch station scheduling in semiconductor manufacturing systems Aguirre AM, Mendez CA, Castro PM Computers & Chemical Engineering, 35(12), 2960, 2011 |