검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Two-step deposition process of piezoelectric ZnO film and its application for film bulk acoustic resonators Park SH, Seo BC, Yoon G, Park HD Journal of Vacuum Science & Technology A, 18(5), 2432, 2000 |
| No. | Article |
|---|---|
| 1 |
Two-step deposition process of piezoelectric ZnO film and its application for film bulk acoustic resonators Park SH, Seo BC, Yoon G, Park HD Journal of Vacuum Science & Technology A, 18(5), 2432, 2000 |