화학공학소재연구정보센터
검색결과 : 5건
No. Article
1 Thermal Stability of Copper Contact Metallization Using Ru-Containing Liner
Seo SC, Yang CC, Hu CK, Kerber A, Fan S, Horak D, Canaperi D, Rao SP, Haran B, Doris B
Electrochemical and Solid State Letters, 14(5), H187, 2011
2 Electromigration cu mass flow in cu interconnections
Hu CK, Canaperi D, Chen ST, Gignac LM, Kaldor S, Krishnan M, Malhotra SG, Liniger E, Lloyd JR, Rath DL, Restaino D, Rosenberg R, Rubino J, Seo SC, Simon A, Smith S, Tseng WT
Thin Solid Films, 504(1-2), 274, 2006
3 Pre-denitrification and Post-nitrification in an Integrated Anaerobic/Aerobic Filter System for Advanced Treatment of Municipal Wastewater
Chang D, Seo SC, Hong KH
Journal of Industrial and Engineering Chemistry, 10(3), 354, 2004
4 Fine-Structures of Valence-Band, X-Ray-Excited Auger-Electron, and Plasmon Energy-Loss Spectra of Diamond-Like Carbon-Films Obtained Using X-Ray Photoelectron-Spectroscopy
Seo SC, Ingram DC
Journal of Vacuum Science & Technology A, 15(5), 2579, 1997
5 Effect of Substrate Bias on the Properties of Diamond-Like Carbon-Films Deposited Using Unbalanced Magnetron Sputtering
Seo SC, Ingram DC, Richardson HH
Journal of Vacuum Science & Technology A, 13(6), 2856, 1995