검색결과 : 1건
No. | Article |
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1 |
Carbon impurity characterization on a linear plasma device using visible emission spectroscopy Whyte DG, Seraydarian RP, Doerner RP Journal of Vacuum Science & Technology A, 17(5), 2713, 1999 |
No. | Article |
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1 |
Carbon impurity characterization on a linear plasma device using visible emission spectroscopy Whyte DG, Seraydarian RP, Doerner RP Journal of Vacuum Science & Technology A, 17(5), 2713, 1999 |