검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
ALD deposited Al(2)O3 films on 6H-SiC(0001) after annealing in hydrogen atmosphere Gao KY, Seyller B, Emtsev K, Ley L, Ciobanu F, Pensl G Materials Science Forum, 483, 559, 2005 |
| No. | Article |
|---|---|
| 1 |
ALD deposited Al(2)O3 films on 6H-SiC(0001) after annealing in hydrogen atmosphere Gao KY, Seyller B, Emtsev K, Ley L, Ciobanu F, Pensl G Materials Science Forum, 483, 559, 2005 |